Specifications
- Control range: 0.005 to 50 SLPM (0.01% to 100% of full scale)
- Flow measurement accuracy: ±(0.8% of reading + 0.2% of full scale)
- Flow measurement repeatability: ±(0.2% of reading + 0.02% of full scale)
- Operating pressure range: 11.5 to 160 PSIA
- Pressure reading accuracy: ±0.5% of reading or ±0.07 PSIA - whichever is greater
- Operating temperature range: -10 to +60°C
- Temperature reading accuracy: ±0.75°C
- Warm up time: <1 second
- Typical Control response time: As fast as 30 ms (T63)
- Normally closed valve (valve is closed when no power is applied)
- Pressure drop: 5 PSID
- Process connections: 1/4" NPT - female
- Dimensions: 4.367"x5.408"x1.600"
Specification Sheet Download
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