BASIS™ mass flow controllers offer repeatable, reliable gas flow control in a compact, durable, metal flow body. Designed for stress-free integration within original equipment manufacturer (OEM) products, BASIS features a small footprint, high-accuracy MEMS sensor and Alicat’s leading fast valve control.

• Reliable. BASIS controllers won’t let you down. NIST-traceable accuracy and repeatable control ensure that your product works the same on Day 700 as it did on Day 1.
• Responsive. Pressure spikes won’t ruin your day. Industry-leading control speed and PD valve tuning lets BASIS mass flow controllers get ahead of the unexpected.
• Compatible. Do more with BASIS controllers. A small footprint, calibration for multiple gases and dual analog-digital communications give your team greater design flexibility.

Specification

• 100 SCCM to 100 SLPM available flow measurement range
• 0.01% to 100% of full scale control range
• Available gases: Air, Ar, CH4, H2, He, N2, N2O, O2
• ±1.5% of reading accuracy for most ranges and gases
• ±0.25% of reading or ±0.05% of full scale repeatability
• 0°C to +50°C Operating Temperature
• 145 psig max operating pressure for most ranges (100 PSIG for 10 SLPM controllers and 60 PSIG for 20 SLPM controllers)
• 25°C & 1 atm STP
• <1 minute warm up time
• 100 ms control response time

Specification Sheet