Specification

• 0.025 SCCM to 5000 SLPM available flow measurement range
• 0.01% to 100% of full scale measurement range
• ±0.6% of reading accuracy on most flow ranges
• ± 0.1% of reading + 0.02% of full scale repeatability
• −10°C to +60°C Operating Temperature
• 145 psig max operating procedure
• 25°C & 1 atm STP default (user selectable)
• 10 ms measurement response time

Spec Sheets

0.5 - 5 SCCM Meter Specification Sheet
10 SCCM - 20 SLPM Meter Specification Sheet
50+ SLPM Meter Specification Sheet

Read More - Industry Examples

- Measuring Gas Flow in research laboratories

- Faster Leak Checking - Alicat Mass Flow Meter and Pressure Controller