100 SLPM Flow Controller

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  • Regular price $2,290.00
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Specifications

  • Control range: 0.01 to 100 SLPM (0.01% to 100% of full scale)
  • Flow measurement accuracy: ±(0.8% of reading + 0.2% of full scale)
  • Flow measurement repeatability: ±(0.2% of reading + 0.02% of full scale)
  • Operating pressure range: 11.5 to 160 PSIA
  • Pressure reading accuracy: ±0.5% of reading or ±0.07 PSIA - whichever is greater
  • Operating temperature range: -10 to +60°C
  • Temperature reading accuracy: ±0.75°C
  • Warm up time: <1 second
  • Typical Control response time: As fast as 30 ms (T63)
  • Normally closed valve (valve is closed when no power is applied)
  • Pressure drop: 15.5 PSID
  • Process connections: 1/4" NPT - female
  • Dimensions: 4.367"x5.408"x1.600"

Specification Sheet Download

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