Specification

• 100 SCCM to 20 SLPM available flow measurement range
• 0.01% to 100% of full scale control range
• Available gases: Air, Ar, CH4, H2, H2, N2, N2O, O2
• ±1.5% of reading accuracy for most ranges and gases
• ±0.25% of reading or ±0.05% of full scale repeatability
• 0°C to +50°C Operating Temperature
• 145 psig max operating pressure for 5 SLPM and below
• 25°C & 1 atm STP
• <1 minute warm up time
• 100 ms control response time

Specification Sheet