5 SLPM BASIS Thermal Mass Flow Controller

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  • Regular price $386.00
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Specifications

  • Control range: 0.005 to 5 SLPM (0.1% to 100% of full scale)
  • Available gases: Air, Ar, CH4, H2, H2, N2, N2O , O2
  • Flow measurement accuracy: ±1.5% of reading or ±0.2% of full scale - whichever is greater (gas dependent)
  • Flow measurement repeatability: ±0.25% of reading or ±0.05% of full scale
  • Operating pressure range: 0 to 145 PSIG
  • Operating temperature range: 0 to 50°C
  • STP 25°C and 1 atm
  • Air preselected
  • Warm up time: <1 minute (5 min optimal)
  • Typical Control response time: As fast as 100 ms (T63)
  • Normally closed valve (valve is closed when no power is ap
  • Pressure drop: 140 mbar (gas dependent)
  • Dimensions: 1.83"x3.31"x1.0" (HxWxD)

Specification Sheet Download

Customizations available in Quantities > 50

 


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