Specifications
- Control range: 0.002 to 2 SLPM (0.1% to 100% of full scale)
- Available gases: Air, Ar, CH4, H2, He, N2, N2O , O2
- Flow measurement accuracy: ±1.5% of reading or ±0.2% of full scale - whichever is greater (gas dependent)
- Flow measurement repeatability: ±0.25% of reading or ±0.05% of full scale
- Operating pressure range: 0 to 145 PSIG
- Operating temperature range: 0 to 50°C
- STP 25°C and 1 atm
- Air preselected
- Warm up time: <1 minute (5 min optimal)
- Typical Control response time: As fast as 100 ms (T63)
- Normally closed valve (valve is closed when no power is applied)
- Pressure drop: 80 mbar (gas dependent)
- Dimensions: 1.55"x2.7"x0.88" (HxWxD)
Specification Sheet Download
Customizations available in Quantities > 50