BASIS™ mass flow controllers offer repeatable, reliable gas flow control in a compact, durable, metal flow body. Designed for stress-free integration within original equipment manufacturer (OEM) products, BASIS features a small footprint, high-accuracy MEMS sensor and Alicat’s leading fast valve control.

    • Reliable. BASIS controllers won’t let you down. NIST-traceable accuracy and repeatable control ensure that your product works the same on Day 700 as it did on Day 1.
    • Responsive. Pressure spikes won’t ruin your day. Industry-leading control speed and PD valve tuning lets BASIS mass flow controllers get ahead of the unexpected.
    • Compatible. Do more with BASIS controllers. A small footprint, calibration for multiple gases and dual analog-digital communications give your team greater design flexibility.


    • 100 SCCM to 100 SLPM available flow measurement range
    • 0.01% to 100% of full scale control range
    • Available gases: Air, Ar, CH4, H2, H2, N2, N2O, O2
    • ±1.5% of reading accuracy for most ranges and gases
    • ±0.25% of reading or ±0.05% of full scale repeatability
    • 0°C to +50°C Operating Temperature
    • 145 psig max operating pressure for most ranges (100 PSIG for 10 SLPM controllers and 60 PSIG for 20 SLPM controllers)
    • 25°C & 1 atm STP
    • <1 minute warm up time
    • 100 ms control response time

    Specification Sheet

    BASIS Series Thermal Mass Flow Controllers and Meters

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    • Regular price $386.00
    Shipping calculated at checkout.

    Default configuration:

    • NPT process connections 
    • Serial communication Alicat ASCII and Modbus RTU over RS-232 
    • Analog communication 0-5v 
    • STP 25C and 1 atm 
    • Gas Selected Air (user configurable) 

    Need a different configuration? Start by selecting your full flow range below.

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