Alicat mass flow meters and controllers require gases to be clean and free from particulates larger than 5-50 microns, depending upon the instrument’s flow range. Our in-line sintered filters prevent particulates larger than this from entering the measurement head of the instrument.
We recommend the following maximum particulate sizes for your mass flow instrument:
Flow ranges of 0-1 sccm or less: maximum 5 microns (5 μm)
Flow ranges between 0-2 sccm and 0-500 sccm: maximum 20 microns (20 μm)
Flow ranges of 0-1 slpm or more: maximum 50 microns (50 μm)